Qty one (1) Nanoimprint Lithography System
| Agency: | |
|---|---|
| Level of Government: | Federal |
| Category: |
|
| Opps ID: | NBD00159711534628890 |
| Posted Date: | Dec 20, 2023 |
| Due Date: | Dec 27, 2023 |
| Source: | https://sam.gov/opp/5261403512... |
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- Contract Opportunity Type: Combined Synopsis/Solicitation (Original)
- All Dates/Times are: (UTC-05:00) EASTERN STANDARD TIME, NEW YORK, USA
- Original Published Date: Dec 19, 2023 11:08 am EST
- Original Date Offers Due: Dec 27, 2023 05:00 pm EST
- Inactive Policy: 15 days after date offers due
- Original Inactive Date: Jan 11, 2024
-
Initiative:
- None
- Original Set Aside:
- Product Service Code: 3670 - SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY
-
NAICS Code:
- 334413 - Semiconductor and Related Device Manufacturing
-
Place of Performance:
Aberdeen Proving Ground , MD 21005USA
The Government requires one (1) nanoimprint lithography system in accordance with the following specifications:
- Shall have a personal computer (PC) controlling nanoimprint lithography system.
- Shall have ultraviolet (UV) imprinting with 365 nanometer (nm) UV light with power output capability of a minimum of 100 milliwatt (mW)/squared centimeters (cm2).
- Shall have UV imprinting with 405nm UV light with power output capability of a minimum 100mW/cm2.
- Shall have a Thermal imprinting at controllable temperatures up to a maximum 250 degrees (°) Celsius (C).
- Shall have a temperature control of a minimum of +/-1°C.
- Shall have a simultaenous UV/thermal imprint processing capabilities.
- Shall have a heating element engineered for direct replacement.
- Shall have pressure membranes engineered for direct replacement.
- Shall have a controllable imprint pressure with a minimum of 0.3 bar and a maximum of 11 bar.
- Shall have automated pressure control.
- Shall have a process substrates maximum of 120mm diameter.
- Shall have process samples and substrates with a minimum height of 20mm.
- Shall have an imprint resolution feature size minimum of 40nm.
- Shall have an integrated vacuum pump system.
- Shall have a minimum of (2) master stamps with test structures
- Shall have a minimum of (1) spare heating element
- Shall have a minimum of (3) spare pressure membranes for thermal imprinting
- Shall have a minimum of (3) spare pressure membrances for UV imprinting
- Shall have a minimum of (10) TOPAS foils for hot embossing
- Shall have a minimum of (10) Polytetrafluoroethylene (PTFE) foils for membrane protection
- Shall have Command & Control available directly from supplied PC.
- Shall have the capability to create, store, and execute imprinting protocols.
- Shall have a fully automated imprinting p rocess controlled from software.
- Shall have an automatic system calibration.
- Shall have a minimum of (1) day of virtual training.
- Shall include freight, shipping and handling to Aberdeen Proving Ground
- KO BLDG 102 AMSSB ACC 2800 POWDER MILL RD
- ADELPHI , MD 20783-1197
- USA
- Andrew S. Nickell
- andrew.s.nickell2.ctr@army.mil
- Dec 19, 2023 11:08 am ESTCombined Synopsis/Solicitation (Original)
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